Molecular structures of composite corrosion inhibitors governing corrosion inhibition performance and material removal rate trend in chemical mechanical polishing of copper
Fields of Study & Subjects
Advanced Surface Polishing Techniques
Corrosion Behavior and Inhibition
Material Properties and Applications
Publication details
- Journal / source
- Electrochimica Acta
- Publisher
- Elsevier BV
- Volume
- 574
- Pages
- 149324–149324
- Publication date
- 11 June 2026
- Language
- EN