Sub-class discovery in semiconductor defect detection through clustering and few-shot learning

Expert Systems with Applications 2026

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Authors: Young-Mok Bae, Yingdong He, Zhen He, Kwang-Jae Kim

DOI: 10.1016/j.eswa.2026.131353

Cited by: 1

References: 59

Fields of Study & Subjects

Industrial Vision Systems and Defect Detection Advanced Neural Network Applications Machine Learning in Materials Science

References 59