A gas flow prover for in-situ calibration of semiconductor process gases based on rate-of-rise method

Flow Measurement and Instrumentation 2026

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Authors: Bin Zhou, Gaoming Zhang, Lei Xiang, Lan Jin, Yupei Zhang, Zhipeng Xu

DOI: 10.1016/j.flowmeasinst.2026.103236

Cited by: 1

References: 8

Fields of Study & Subjects

Flow Measurement and Analysis Advanced Sensor Technologies Research Scientific Measurement and Uncertainty Evaluation

References 8