Investigating viscous heating and shear-driven flow using various solid interfaces in semiconductors CMP process

International Journal of Heat and Mass Transfer 2026

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Authors: Syed Ahmad Ali Shah, BoHung Kim

DOI: 10.1016/j.ijheatmasstransfer.2026.129088

Cited by: 1

References: 50

Fields of Study & Subjects

Thermal properties of materials Nanopore and Nanochannel Transport Studies Advanced Surface Polishing Techniques

References 50