Proton exchange membrane electrolysis (PEMWE) producing low-carbon Ozone for application in green semiconductor manufacturing processes

International Journal of Hydrogen Energy 2026

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Authors: Wasim Abbas, Gumin Jung, A.E. Atabani, Jyun-Wei Yu, Pan-Yen Chen, Fang-Bor Weng, Pandu Ranga Tirumalasetti

DOI: 10.1016/j.ijhydene.2026.153516

Cited by: 2

References: 33

Fields of Study & Subjects

Hybrid Renewable Energy Systems Fuel Cells and Related Materials Advancements in Solid Oxide Fuel Cells

References 33