High-quality laser slicing of single-crystal semiconductors guided by energy-dependent phase transition and crack propagation: A 4H-SiC case study

International Journal of Machine Tools and Manufacture 2026

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Authors: Zelong Qing, B. J. Liu, Yaoen Luo, Yi Zhang

DOI: 10.1016/j.ijmachtools.2026.104365

Cited by: 7

References: 51

Fields of Study & Subjects

Advanced Surface Polishing Techniques Laser Material Processing Techniques Silicon and Solar Cell Technologies

References 51