Mechanisms of reactive medium-assisted laser ablation of thermally active materials: a case study of hydrochloric film-assisted laser machining of microchannel arrays on AlN

International Journal of Machine Tools and Manufacture 2026

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Authors: Jiawei Liu, Ni Chen, Kaixuan Feng, Qi Liu, Yonghui Xu, Xiang Lorraine Li, Eberhard Abele, Ning He

DOI: 10.1016/j.ijmachtools.2026.104388

Cited by: 6

References: 44

Fields of Study & Subjects

Laser Material Processing Techniques Laser-Ablation Synthesis of Nanoparticles Silicon Nanostructures and Photoluminescence

References 44