Force-modulated structured tool nanoimprinting: predictive depth control and spacing-driven plasticity

International Journal of Machine Tools and Manufacture 2026

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Authors: Zaizhen Lou, Yongda Yan, Xin Yang, Bosen Jia, Yanquan Geng

DOI: 10.1016/j.ijmachtools.2026.104413

Cited by: 3

References: 89

Fields of Study & Subjects

Nanofabrication and Lithography Techniques Advanced Surface Polishing Techniques Nonlocal and gradient elasticity in micro/nano structures

References 89