Modeling and analysis of glass warpage in roll-to-plate hot embossing

International Journal of Mechanical Sciences 2026

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Authors: Zhanchen Zhu, ChiFai Cheung, Xusheng Yang, Haihui Ruan

DOI: 10.1016/j.ijmecsci.2026.111187

Cited by: 1

References: 83

Fields of Study & Subjects

Nanofabrication and Lithography Techniques Advanced Surface Polishing Techniques 3D IC and TSV technologies

References 83