Ultimate tensile strength of atomic layer deposited Al2O3 nanofilms

International Journal of Mechanical Sciences 2026

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Authors: Kia Dastani, Mohammad Reza Movahhedy, S. Khodaygan, Micheal Yu Wang, Hongyu Yu
DOI: 10.1016/j.ijmecsci.2026.111355
Cited by: 1
References: 52

Fields of Study & Subjects

Advanced ceramic materials synthesis Semiconductor materials and devices Metal and Thin Film Mechanics

Publication details

Journal / source
International Journal of Mechanical Sciences
Publisher
Elsevier BV
Volume
314
Pages
111355–111355
Publication date
4 February 2026
Language
EN