Acoustic levitator featuring simple structure for stable levitation of multi-size wafers

International Journal of Mechanical Sciences 2026

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Authors: Lipeng Wang, Jiang Wu, Junjie Tian, Xuewen Rong, Rui Song, Y B Li

DOI: 10.1016/j.ijmecsci.2026.111453

Cited by: 0

References: 82

Fields of Study & Subjects

Microfluidic and Bio-sensing Technologies Piezoelectric Actuators and Control Magnetic Bearings and Levitation Dynamics

References 82