Cumulative material removal and surface prediction of 4H-SiC

International Journal of Mechanical Sciences 2026

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Authors: Shuoshuo Qu, Yang Sun, Yuying Yang, Peng Yao, Chen Li, Tingting Wang, Zeming Li, Ziteng Zhang

DOI: 10.1016/j.ijmecsci.2026.112036

Cited by: 1

References: 95

Fields of Study & Subjects

Silicon Carbide Semiconductor Technologies Advanced Surface Polishing Techniques Advanced ceramic materials synthesis

References 95