From data to process insights: Hybrid modeling strategies for chemical vapor deposition processes

International Journal of Refractory Metals and Hard Materials 2026 Open access

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Authors: Eleni D. Koronaki, Dimitris G. Giovanis, Geremy Loachamín Suntaxi, M. Kathrein, Christoph Czettl, Andreas G. Boudouvis, Stephane P.A. Bordas
DOI: 10.1016/j.ijrmhm.2026.107750
Cited by: 0
References: 35

Fields of Study & Subjects

Machine Learning in Materials Science Model Reduction and Neural Networks Fault Detection and Control Systems

Publication details

Journal / source
International Journal of Refractory Metals and Hard Materials
Volume
138
Pages
107750–107750
Publication date
7 March 2026
Language
EN