Influence of nitrogen content on the structural, tribological, and adhesion properties of TiWAlSiCu-N films deposited by magnetron sputtering

International Journal of Refractory Metals and Hard Materials 2026

View at publisher
Authors: Semih Duran
DOI: 10.1016/j.ijrmhm.2026.107914
Cited by: 1
References: 61

Fields of Study & Subjects

Metal and Thin Film Mechanics Advanced materials and composites Semiconductor materials and interfaces

Publication details

Journal / source
International Journal of Refractory Metals and Hard Materials
Publisher
Elsevier BV
Volume
140
Pages
107914–107914
Publication date
11 June 2026
Language
EN