Cooperative control of high aspect ratio anisotropic dry etching and composition for Bi2Te2.7Se0.3 thermoelectric film

Journal of Alloys and Compounds 2026

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Authors: Erbiao Min, Yixuan Shi, Shuai Zhou, Jianghe Feng, Juan Li, Rong Sun, RuiHeng Liu

DOI: 10.1016/j.jallcom.2026.186411

Cited by: 1

References: 34

Fields of Study & Subjects

Advanced Thermoelectric Materials and Devices Solar Thermal and Photovoltaic Systems Ferroelectric and Piezoelectric Materials

References 34