Synthesis of high-density Hf1-x Lax O2 (HLO) ceramic targets with suppressed secondary phase and growth of thin films by rf magnetron sputtering

Journal of Alloys and Compounds 2026

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Authors: Jae ho Park, Rui He, In Pyo Hong, Min Joon Kim, Young‐Ho Kim, Hak Ki Yu, Chung Wung Bark

DOI: 10.1016/j.jallcom.2026.186958

Cited by: 1

References: 41

Fields of Study & Subjects

Ferroelectric and Negative Capacitance Devices Ferroelectric and Piezoelectric Materials Semiconductor materials and devices

References 41