Influence of substrate temperature on the microstructure, hardness, and transparency of hexagonal AlCrN and AlCrSiN coatings

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Authors: Du-Cheng Tsai, Zue Chin Chang, Lung-Wei Cheng, Rong-Hsin Huang, Erh.-Chiang. Chen, Fuh‐Sheng Shieu
Cited by: 1
References: 50

Fields of Study & Subjects

Metal and Thin Film Mechanics Advanced ceramic materials synthesis Diamond and Carbon-based Materials Research

Publication details

Journal / source
Journal of Alloys and Compounds
Publisher
Elsevier BV
Volume
1058
Pages
187018–187018
Publication date
24 February 2026
Language
EN