Experimental study on cluster-electrode electrochemical mechanical polishing of single-crystal silicon carbide wafers

Journal of Alloys and Compounds 2026

View at publisher

Authors: Xin Chen, Rongji Zhuang, Qinglei Ren, Hongming Chen, Shijie Li, Yongle Liu, Man Hoi Wong, Jisheng Pan

DOI: 10.1016/j.jallcom.2026.187582

Cited by: 4

References: 24

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced Machining and Optimization Techniques Silicon and Solar Cell Technologies

References 24