Enhancement of edge quality in SiC single crystals via flow field control with multi-zone graphite rings

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Authors: Peng Liu, Wancheng Yu, Wenhao Han, Ning Zhang, Xuejian Xie, Xianglong Yang, Xiufang Chen, Xiaobo Hu, Xiangang Xu
Cited by: 1
References: 35

Fields of Study & Subjects

Advanced ceramic materials synthesis Silicon Carbide Semiconductor Technologies Graphite nuclear technology radiation studies

Publication details

Journal / source
Journal of Alloys and Compounds
Publisher
Elsevier BV
Volume
1068
Pages
188578–188578
Publication date
1 May 2026
Language
EN