The effect of metal doping on the piezoelectric response of AlN film ultrasonic transducers

Journal of the European Ceramic Society 2026

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Authors: Xiaomei Zeng, Heng Jiang, Rakhimbergan Rakhimov, Shavkat Yuldashev, Changwei Zou, Jun Zhang, Oleksandr Dmytrovych Pohrebniak, Bing Yang, Sheng Liu, Vasiliy Pelenovich
DOI: 10.1016/j.jeurceramsoc.2026.118169
Cited by: 1
References: 29

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Ultrasonics and Acoustic Wave Propagation Metal and Thin Film Mechanics

Publication details

Journal / source
Journal of the European Ceramic Society
Publisher
Elsevier BV
Volume
46
Issue
8
Pages
118169–118169
Publication date
24 January 2026
Language
EN