Effect of laser power on subsurface damage in laser-assisted machining of monocrystalline silicon

Journal of Manufacturing Processes 2026

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Authors: Guohui Li, Gangjie Luo, Jiafu Zhou, Yang ou, Cheng Huang, Chaoliang Guan, Yifan Dai, Xiaoqiang Peng, Yupeng Xiong

DOI: 10.1016/j.jmapro.2026.02.037

Cited by: 1

References: 46

Fields of Study & Subjects

Laser Material Processing Techniques Advanced Surface Polishing Techniques Laser and Thermal Forming Techniques

References 46