High-efficiency and deterministic finishing of optical glass via multi-mode air-jet chemical mechanical polishing

Journal of Manufacturing Processes 2026

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Authors: Zili Zhang, Wei Wu, Chi Fai Cheung, Rui Gao, Zongbao He, Yuanliu CHEN, Yanjun Han, Jun Zhao, Chunjin Wang

DOI: 10.1016/j.jmapro.2026.02.077

Cited by: 4

References: 46

Fields of Study & Subjects

Advanced Surface Polishing Techniques Laser Material Processing Techniques Surface Roughness and Optical Measurements

References 46