Laser-grooving-assisted dicing of monocrystalline silicon: Surface morphology and material removal mechanism

Journal of Manufacturing Processes 2026

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Authors: Jingzhu Pang, Zikang Fu, Xiaomin Liu, Chongjun Wu

DOI: 10.1016/j.jmapro.2026.04.044

Cited by: 1

References: 39

Fields of Study & Subjects

Advanced Surface Polishing Techniques Laser Material Processing Techniques Advanced machining processes and optimization

References 39