Machine-learning-driven prediction and multi-objective optimization of Ta2O5 film performance in ion-assisted electron beam evaporation

Journal of Manufacturing Processes 2026

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Authors: Ziyang He, Hongqin Lei, Liang Chen, Hui Li, Xianghui Huang, Yaowei Wei, Fei Zhang, Zhenfei Luo, Jian Cheng, Linjie Zhao, Mingjun Chen

DOI: 10.1016/j.jmapro.2026.07.017

Cited by: 1

References: 31

Fields of Study & Subjects

Advanced Electron Microscopy Techniques and Applications Electron and X-Ray Spectroscopy Techniques Semiconductor materials and devices

References 31