High-efficiency submerged air jet chemical mechanical polishing at the atomic and close-to-atomic scale

Journal of Materials Processing Technology 2026

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Authors: Zili Zhang, Song Yuan, Chi Fai Cheung, Wei Wu, Ze Li, Kangsen Li, Chunjin Wang

DOI: 10.1016/j.jmatprotec.2025.119195

Cited by: 10

References: 66

Fields of Study & Subjects

Erosion and Abrasive Machining Advanced Surface Polishing Techniques Surface Modification and Superhydrophobicity

References 66