Ultra-smooth surface of RB-SiC generated by a piezo-Fenton chemical mechanical polishing with high material removal rate

Journal of Materials Processing Technology 2026

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Authors: Haoran Liu, Yikai Zang, Zhi Wang, Xiaoyang Jiang, Jianning Chu, Jianguo Zhang, Jianfeng Xu, Junfeng Xiao

DOI: 10.1016/j.jmatprotec.2026.119235

Cited by: 3

References: 41

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Advanced ceramic materials synthesis

References 41