Pulsed laser machining of silicon carbide wafers: A review

Journal of Materials Processing Technology 2026

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Authors: Yu Xuehua, Wei Haiying, Zhang Yi, Qing Zelong, Liu Fu, Yang Yuchao, Li Yanpu

DOI: 10.1016/j.jmatprotec.2026.119241

Cited by: 6

References: 170

Fields of Study & Subjects

Laser Material Processing Techniques Advanced Surface Polishing Techniques Advanced machining processes and optimization

References 170