Balancing surface quality and machining efficiency in fused-silica hemispherical resonator via combined magnetorheological polishing and chemical etching

Journal of Materials Processing Technology 2026

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Authors: Chuanzhen Ma, Henan Liu, Jian Cheng, Jingyang Guo, Jiangang Sun, Zihan Zhou, Biao Qin, Jinchuan Tian, Mingjun Chen

DOI: 10.1016/j.jmatprotec.2026.119249

Cited by: 3

References: 36

Fields of Study & Subjects

Geophysics and Sensor Technology Advanced MEMS and NEMS Technologies Vibration Control and Rheological Fluids

References 36