Defect-deflection-driven ductile machining beyond the BDT depth in hard–brittle materials: Insights from non-resonant oblique EVC of monocrystalline silicon

Journal of Materials Processing Technology 2026

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Authors: Mei Chi, Yuntuo Li, Jinguo Han, Zhenghao Wang, Ding Li, Shiquan Zhang, Shiyu Li, Xianfu Liu, Hao Yun, Yukang Zhao, Yanhou Liu, Guoyong Zhao
DOI: 10.1016/j.jmatprotec.2026.119279
Cited by: 3
References: 59

Fields of Study & Subjects

Advanced Surface Polishing Techniques Optical Coatings and Gratings Advanced MEMS and NEMS Technologies

Publication details

Journal / source
Journal of Materials Processing Technology
Publisher
Elsevier BV
Volume
351
Pages
119279–119279
Publication date
8 March 2026
Language
EN