Heat-assisted chemical mechanical polishing of polycrystalline AlN: Thermochemical surface regulation for damage-free planarization

Journal of Materials Processing Technology 2026

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Authors: Jinming Li, Tianyi Sui, Bo Lv, Xingwang Xu, Haoxuan Du, Hetian Hou, Bin Lin, Yinghua Qiu, Usen K. Omuraliev

DOI: 10.1016/j.jmatprotec.2026.119390

Cited by: 3

References: 67

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced machining processes and optimization Advanced ceramic materials synthesis

References 67