Fenton reaction-assisted chemical mechanical polishing of SiC wafer using gel disc with Al₂O₃‑SiO₂ core‑shell abrasives

Journal of Materials Processing Technology 2026

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Authors: Lanxing Xu, Mingfeng Ke, Liang Zhao, Kaiping Feng, Yi-Xiang Wang, Tianchen Zhao, Binghai Lyu

DOI: 10.1016/j.jmatprotec.2026.119400

Cited by: 1

References: 25

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Advanced machining processes and optimization

References 25