Wafer defect semantic reasoning via a three-stage retrieval-augmented system in semiconductor manufacturing

Journal of Manufacturing Systems 2026

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Authors: Xinting Liao, Jie Zhang, Youlong Lyu, Junliang Wang

DOI: 10.1016/j.jmsy.2025.12.026

Cited by: 2

References: 51

Fields of Study & Subjects

Industrial Vision Systems and Defect Detection Advanced Neural Network Applications Explainable Artificial Intelligence (XAI)

References 51