Dual-pathway mechanism of Fe-doped CeO2 abrasives in photo-Fenton-assisted CMP of SiC

Journal of Rare Earths 2026

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Authors: Ning Xu, Ziheng Gao, Yu Huo, Kailong Gao, Yansong Wang, Guosheng Zhang, Yu Lin, Zheng Wang

DOI: 10.1016/j.jre.2026.02.005

Cited by: 4

References: 43

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Advanced ceramic materials synthesis

References 43