Mechanics analysis of support loss mechanisms in flexible MEMS resonators

Journal of Sound and Vibration 2026

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Authors: Siyu Chen, Shuolong Yang, Chengzhong Ma, Qiaoqiao Liu, Weijian Jiao, Y Chen, Yong Zhang

DOI: 10.1016/j.jsv.2026.119832

Cited by: 1

References: 44

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Nonlocal and gradient elasticity in micro/nano structures

References 44