High-hardness AlNbTiZrN films prepared by magnetron sputtering: Microstructural characterization, and tribological behavior

Materials Characterization 2026

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Authors: Bingxu Wang, Peng Li, Zhipeng Yuan, Yinghui Dong, Wenjun Yang, Zhaobing Cai, Le Gu

DOI: 10.1016/j.matchar.2026.116052

Cited by: 1

References: 89

Fields of Study & Subjects

Metal and Thin Film Mechanics Acoustic Wave Resonator Technologies GaN-based semiconductor devices and materials

References 89