Microstructure and resistivity of nanoscale Co-Pt intermetallic compounds for scaled interconnects

View at publisher
Authors: Ji Sung Moon, Eunsoo Oh, Young Jun Jang, Eunjin Jeong, Jun Hwan Moon, Yanghee Kim, Young Keun Kim
Cited by: 0
References: 36

Fields of Study & Subjects

Copper Interconnects and Reliability Semiconductor materials and interfaces Electrical and Thermal Properties of Materials

Publication details

Journal / source
Materials Characterization
Volume
233
Pages
116141–116141
Publication date
8 February 2026
Language
EN