Microstructure and resistivity of nanoscale Co-Pt intermetallic compounds for scaled interconnects
Fields of Study & Subjects
Copper Interconnects and Reliability
Semiconductor materials and interfaces
Electrical and Thermal Properties of Materials
Publication details
- Journal / source
- Materials Characterization
- Volume
- 233
- Pages
- 116141–116141
- Publication date
- 8 February 2026
- Language
- EN