Combined effects of substrate temperature and film thickness on structure and optical-electrical properties of ITO films prepared by RF magnetron sputtering

Materials Chemistry and Physics 2026

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Authors: B. L. Zhu, H.B. Wang, F. Liu, J. Wu, X.W. Shi, W.Q. Sun
DOI: 10.1016/j.matchemphys.2026.132375
Cited by: 2
References: 73

Fields of Study & Subjects

ZnO doping and properties Thin-Film Transistor Technologies Polymer Nanocomposite Synthesis and Irradiation

Publication details

Journal / source
Materials Chemistry and Physics
Publisher
Elsevier BV
Volume
357
Pages
132375–132375
Publication date
19 March 2026
Language
EN