Synthesis and analysis of titanium nitride/titanium oxynitride films using colliding plasma pulsed laser deposition techniques

Materials Research Bulletin 2026

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Authors: Ravi Pratap Singh, Astha Shukla

DOI: 10.1016/j.materresbull.2026.114030

Cited by: 1

References: 49

Fields of Study & Subjects

Metal and Thin Film Mechanics Advanced ceramic materials synthesis Semiconductor materials and devices

References 49