Hydroxide-catalyzed bonding of sapphire and quartz glass enabled by plasma activation

Materials Letters 2026 Open access

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Authors: Erni Shao, Han Yan, Yan Ma, Yufei Bai, Yanhong Tian, Tadatomo Suga, Chenxi Wang
DOI: 10.1016/j.matlet.2026.140115
Cited by: 0
References: 11

Fields of Study & Subjects

3D IC and TSV technologies Glass properties and applications Laser Material Processing Techniques

Publication details

Journal / source
Materials Letters
Volume
408
Pages
140115–140115
Publication date
15 January 2026
Language
EN