Defect Dynamics in Phosphorus-implanted Si(100) under Swift Heavy Ion Irradiation: X-ray Photoelectron Spectroscopy
Fields of Study & Subjects
Ion-surface interactions and analysis
Silicon and Solar Cell Technologies
Semiconductor materials and interfaces
Publication details
- Journal / source
- Materials Letters
- Volume
- 412
- Pages
- 140356–140356
- Publication date
- 26 February 2026
- Language
- EN