Sustaining high vacuum in sealed MEMS devices: role of ion-sorption pump and electron-stimulated desorption

Measurement 2026

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Authors: Paweł Urbański, Tomasz Grzebyk

DOI: 10.1016/j.measurement.2026.120496

Cited by: 1

References: 26

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Particle Detector Development and Performance Plasma Diagnostics and Applications

References 26