Selection of measurement parameters based on the dynamic characteristics of the scanning probe

Measurement 2026

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Authors: Xinfeng Lv, Yijun Shen, Xu Zhang, Zhijie Hua, Weichao Guo, Dawei Tu

DOI: 10.1016/j.measurement.2026.120501

Cited by: 1

References: 18

Fields of Study & Subjects

Advanced Measurement and Metrology Techniques Optical measurement and interference techniques Iterative Learning Control Systems

References 18