The path to high-performance: the manufacturing, measurement, and trimming for hemispherical resonators

Measurement 2026

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Authors: Wenhui Chen, Tao Lai, Yufang Zhou, Qinghang Liu, Wenxiang Peng, Fulei Chen, S. M. Chen, Junfeng Liu

DOI: 10.1016/j.measurement.2026.120582

Cited by: 2

References: 121

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Geophysics and Sensor Technology Inertial Sensor and Navigation

References 121