A rotation-iterative decoupling method for time-varying support-induced aberrations in interferometric optical surface measurement

Measurement 2026

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Authors: Zhenghao Weng, Shuhao Kang, Jinyong Che, Guoqing Sheng, Zheng Jiang, Xi Wang, Mingjun Ren, Duo Li

DOI: 10.1016/j.measurement.2026.120836

Cited by: 0

References: 38

Fields of Study & Subjects

Optical measurement and interference techniques Advanced Measurement and Metrology Techniques Surface Roughness and Optical Measurements

References 38