Data-driven modeling and estimation of beam position drift for electron beam systems

Mechatronics 2026

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Authors: Katharina Schrom, Andreas Deutschmann, Roland Falkensteiner, Andreas Kugi
DOI: 10.1016/j.mechatronics.2026.103507
Cited by: 0
References: 10

Fields of Study & Subjects

Control Systems and Identification Advanced Measurement and Metrology Techniques Fault Detection and Control Systems

Publication details

Journal / source
Mechatronics
Volume
117
Pages
103507–103507
Publication date
12 March 2026
Language
EN