An electromagnetic study of scalability of Si3N4 optical waveguides for 3D nanophotonic integration with CMOS electronics in AI era

Microelectronic Engineering 2026

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Authors: Wenli Zhou, Rui (Ray) Yao, Sang Lam

DOI: 10.1016/j.mee.2025.112440

Cited by: 0

References: 29

Fields of Study & Subjects

Photonic and Optical Devices Near-Field Optical Microscopy Laser Material Processing Techniques

References 29