Stress modulation of 2DEG concentration in thin-barrier AlGaN/GaN HEMT on Si substrate via LPCVD SiN: Experiment and simulation

Microelectronics Journal 2026

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Authors: Quanxu Su, Jiejie Zhu, Mingdong Li, Bowen Zhang, Lingjie Qin, Qing Zhu, Xiaohua Ma

DOI: 10.1016/j.mejo.2026.107087

Cited by: 1

References: 25

Fields of Study & Subjects

GaN-based semiconductor devices and materials Advanced Sensor and Energy Harvesting Materials Acoustic Wave Resonator Technologies

References 25