Investigation of convex/concave channel shaping with confined charge trap nitride for high-reliability 3D NAND flash applications

Microelectronics Journal 2026 Open access

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Authors: Jeongmin Shin, S. H. Kim, Yun-Heub Song

DOI: 10.1016/j.mejo.2026.107092

Cited by: 0

References: 29

Fields of Study & Subjects

Semiconductor materials and devices Advanced Data Storage Technologies Advancements in Semiconductor Devices and Circuit Design

References 29