Beyond planar: A vertical sense mass approach to overcome damping challenge in MEMS gyroscope

Micro and Nanostructures 2026

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Authors: Shaveta, R.K. Bhan, Rishu Chaujar

DOI: 10.1016/j.micrna.2025.208539

Cited by: 2

References: 20

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Geophysics and Sensor Technology

References 20