Impact of spacer dielectric materials on advanced stacked nanosheet field effect transistors

Micro and Nanostructures 2026

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Authors: M. Balasubrahmanyam, Ekta Goel, Kunal Singh, Sanjay Kumar
DOI: 10.1016/j.micrna.2026.208576
Cited by: 2
References: 26

Fields of Study & Subjects

Advancements in Semiconductor Devices and Circuit Design Ferroelectric and Negative Capacitance Devices Semiconductor materials and devices

Publication details

Journal / source
Micro and Nanostructures
Publisher
Elsevier BV
Volume
212
Pages
208576–208576
Publication date
18 January 2026
Language
EN